
As outlined in the 2007 edition of the International Technology Roadmap for Semiconductors (ITRS), the most immediate technology challenge the automatic test equipment (ATE) industry faces is “test for yield learning” - essential for fab process and device learning below the wavelength of light or the sub-optical space of 90 and 65 and 45 nm and future process nodes.
Discrete challenges are combining and churning to create a “perfect storm” for ATE vendors to maneuver around, while they also take on a myriad of design sensitivity issues occurring at 90 nm and below. Recent assembly and packaging technology advancements, combined with the challenges of optimizing the same wafer fabrication process for different core semiconductor technologies, are helping system-in-a-package (SiP) gain ground on system-on-a-chip (SoC). But wafer fab process improvements and design/design for test (DFT) needs show potential to push SoC to the forefront. Or, we may see more hybrids in the future. One thing is for sure: Integration is a trend that shows no sign of slowing, and it’s introducing more complexity into the equation.
Designs below the 90 nm node are extremely sensitive to fabrication equipment variation, which is causing new defect mechanisms and fault models for SoC and SiP. “We’re moving from the world of random defects from particulates to systemic defects caused by the finite sensitivity between the design and process,” said Colin Ritchie, Verigy’s (Cupertino, Calif.) product marketing director of the Inovys yield-related line. “In addition to addressing systemic problems, our customers are seeing more parametric variability, which can exhibit in a number of different areas. Transistor performance is degraded because of leakage issues, and sensitivities to small variations in voltage, power, temperature or any other operating environmental effect can cause the design to perhaps function, but not to specification. It’s particularly challenging when you look at very advanced high-power devices in the communications, computer or graphics or other markets. These problems require new solutions. This is where the ATE industry is being challenged in a new domain.”
All of the top semiconductor manufacturers are finding that the contribution of yield loss caused by design-induced problems or design sensitivities gets out of whack as they move to sub-90 nm designs. “They may have followed more than 300 design rules and done all the design simulation that their EDA tools enable them to do, but they’re still finding significant contribution of yield loss due to sensitivity,” Ritchie elaborated. To put it into perspective, a typical 90 nm fab today produces somewhere on the order of 30,000 wpm, which run about $5000/wafer. Every single-digit percentage of yield improvement or loss contributes roughly $1.5M to revenues each month. This makes accelerating the detection and diagnosis of design-induced failures a priority in terms of achieving time-to-market for these devices.
“There are several elements of complexity here to deal with the sheer number of transistors being embedded into a single device and the interoperability between one microprocessor core and the next,” Ritchie said. “While the number of transistors has increased exponentially, what hasn’t changed is the external I/O - 300-500 pins is mainstream now.”
What do you do when you’ve got all this complexity, more transistors, less access and debug time, and are under pressure to get the job done faster? One way to address it is to get a better view inside the device, inside the I/O, using DFT. “Essentially, you scan elements into a design to significantly increase the stimulus and observation of that design within the die - rather than from outside,” Ritchie said.
Why is DFT so important? “What we’re finding at the advanced technology nodes is that the DFT or structures scan is actually detecting the design for process sensitivities first,” Ritchie explained. “In these advanced devices, typically the design process goes through a number of phases of laying out the design in which the mission-critical high-performance stuff is started first because it requires very tight control over the design and layout. Then it goes through a number of stages of laying out the memory and the analog, then somewhere - usually last on the list - they press ‘DFT’ in the EDA tools and structures get laid out automatically. Because it’s laid out last, it’s not uncommon for it to be ‘non-optimized’ since it goes through multiple metal layers, longer wires and more vias. This results in a sensitivity between design and process, and it’s natural that we’re seeing it first with DFT in the least optimized part of the design.” |